Hal Amick
Many
processes involved in advanced technology applications are highly sensitive to
vibrations. Among these processes are precision metrology, high-energy
physics, long-beam-path laser applications, biotechnology research, and the
R&D and production of semiconductors. When designing facilities housing this
equipment, considerable attention is spent on the mechanical and structural
aspects. In most cases, vibration control measures add significantly to the
cost of construction.
This article discusses the following issues:
• Vibrations can alter readings
• What causes vibrations?
• Vibration criteria
• Velocity Criteria (VC) Curves
• Walking is the biggest problem
• What does this mean for future design?
LABoratory: Earl Walls Associates Quarterly Report, Fall 2001, Vol. 6, No. 1,
pp. 3-4.
Go to the paper:
http://www.ewalab.com/pubs/issues/fall01.pdf