Hal Amick, Michael Gendreau and Colin G. Gordon
The
paper presents an overview of the vibration requirements of nanotechnology
facilities, drawn from both the semiconductor world and that of precision
metrology. Structural approaches are discussed which are commonly used to meet
some of the special vibration needs of these facilities.
Proceedings of the Symposium on Nano Device Technology 2002, May 2-3, 2002,
National Chiao-Tung University, Hsinchu, Taiwan