Noise and Vibration Characteristics of
Cleanroom Fan-Filter Units

Mei Q. Wu and Colin G. Gordon

Fan-filter units are an increasingly popular alternative to packaged air handlers or fan-tower recirculation air systems. They are used in mini-environments and general cleanrooms, especially in retrofit cleanrooms with limited height. This paper presents noise and vibration data measured from 9 fan-filter units. It also presents measurement methods and performance criteria for fan-filter units.

Reprinted from Proceedings of the 16th International Congress on Acoustics, p. 771-772, (1998)

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