Effects of Acoustic Noise on Optical Equipment

Michael Gendreau

Jul 1, 1999

Optical tools respond to internal vibration that can be excited by the external acoustic environment. The degree to which this occurs depends on many factors, but primarily the correspondence between the resonance characteristics of the tool and the frequency content of the acoustic environment in which it operates. Adverse noise environments, such as those often found in operating laboratories ...

Dynamic Characteristics of Structures Extracted from In-situ Testing

Hal Amick, Michael Gendreau

Jul 1, 1999

The paper discusses two primary areas of interest in a structural evaluation. First, in-situ measurements are used to confirm the predicted structural stiffnesses and resonance frequencies. Second, the evaluation characterizes the manner in which vibrations are propagated through the structure. Methodologies are presented for carrying out these measurements, and typical data are given. ...

Environmental Noise Control for Semiconductor Manufacturing Facilities

Michael Gendreau

Dec 1, 1999

This paper summarizes the authors' experience in modeling and controlling environmental noise from more than 30 semiconductor manufacturing plants ("wafer fabs") within the past six years. This type of facility typically has a large number of concentrated noise sources because of the unusually large amount of intake and circulation air required to maintain cleanroom conditions, the ...

Construction Vibrations and Their Impact on Vibration-Sensitive Facilities

Hal Amick, Michael Gendreau

Feb 1, 2000

An approach is presented for performing site-specific assessment of the impact of construction vibrations on vibration-sensitive facilities. This requires expansion of existing methodologies such that frequency content is included. A case study is included. ...

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